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A cavity-backed antenna element is introduced and investigated for the antenna-in-package applications at 60GHz frequency band. A thin-film Silicon-based technology is used to implement the antenna element and two different configurations for 1×4 arrays of the same element. The feeding networks of the arrays are designed in such a manner that one of them has its main beam in the broad-side direction while the main beam of the second one is rotated to 45 degrees. Simulation and measurement results of return loss, radiation patterns and realized peak gains are compared.