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Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester

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5 Author(s)
G. Altena ; Imec/Holst Centre, Eindhoven, The Netherlands ; D. Hohlfeld ; R. Elfrink ; M. H. Goedbloed
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This paper reports on the design, modelling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester with an elegant and robust process flow. The fabrication is based on a SOI wafer with self-aligned electrodes of the variable capacitor. The output current of the device shows distinct steps that are caused by strong lateral electrostatic forces. An electro-mechanical model was used to analyze and confirm the observed behaviour.

Published in:

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

5-9 June 2011