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Design and fabrication of mechanical resonance based scanning endoscope

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5 Author(s)
Gu, K. ; Dept. of Mech. Eng., Univ. of Washington, Seattle, WA, USA ; Lee, C.-C. ; Cui, W. ; Wu, M.
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Here we present a new microfabricated optical endoscope using a fully integrated optical waveguide with a push-pull piezoelectric actuator design. This new scanning probe was constructed using SU-8 epoxy-based photoresist as a resonant cantilever. The scanner was driven with a frequency of 25 Hz in the horizontal direction and a frequency of 4.71 kHz in the vertical direction. The best resolution obtained by the scanner is ~4 μm. A specific application for the design is in the area of endoscopy, where there is a need for a minimally invasive device that reduces the discomfort experienced by the patient by reduces the overall geometry of the endoscope.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011