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On-chip RF inductors with magnetic nano particles medium

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4 Author(s)
Yang, C. ; Univ. of California, Berkeley, CA, USA ; Koh, K. ; Zhu, X. ; Lin, L.

This paper presents on-chip planar inductors fully filled with magnetic-nano-particles-medium (MNPM) for compact and high-performance RF IC applications. In the prototype design, planar inductors have been constructed by using a filling process using nickel-ion permalloy (Ni80Fe17Mo3) of sub-100nm in diameter to increase the inductance while maintaining the magnetic performance for high-frequency circuitry. Preliminary results of stripline sample show more than 100% enhancement in inductance (L) with quality factor (Q) of about 20 up to 8GHz, which is very promising for RF ICs.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011

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