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We present the very high frequency (VHF) operation of a nano-mechanical double-ended tuning fork resonator (DETF), in which two fin field effect transistors (FinFET) are co-integrated. We benefit from the excellent mixing properties of the FinFET to characterize accurately its fundamental resonance (f0=113 MHz) and quality factor (Q=1300) and compare these results with clamped-clamped (cc-) beam FinFET resonators of similar dimensions. We find the tuning fork design to be superior in terms of Q-factors, transconductance and available on-current.
Date of Conference: 5-9 June 2011