Referenced Items are not available for this document.
In this work, we proposed a hybrid PDMS-silicon electrostatic actuator with a large stroke under low driving voltages. The device features a staggered vertical comb-drive suspended by PDMS springs. Because of the flexibility of PDMS, an initial staggered displacement was naturally formed due to the self-weight of the device. Experimental results showed that the combination of polymeric springs and silicon structures enabled the large stroke of 3.73 μm at 3.5 kHz. The presented heterogeneous integration technology improves the performance and may bring new functionalities to micro-systems.
Published in:
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Date of Conference: 5-9 June 2011
- Page(s):
- 1476 - 1479
- ISSN :
- Pending
- Print ISBN:
- 978-1-4577-0157-3
- INSPEC Accession Number:
- 12169736
- Conference Location :
- Beijing
- Digital Object Identifier :
- 10.1109/TRANSDUCERS.2011.5969630
- Product Type:
- Conference Publications
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