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Characterization of the 2nd generation magnetic microbearing with integrated stabilization for frictionless devices

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4 Author(s)
V. Badilita ; Laboratory for Microactuators, Dept. of Microsystems Engineering - IMTEK, University of Freiburg, Germany ; S. Rzesnik ; K. Kratt ; U. Wallrabe

We present for the first time a full characterization of a microbearing based on stabilized magnetic levitation. The device consists of two coaxial wirebonded solenoidal microcoils (2000 μm and 3600 μm diameter) for levitation and stabilization purposes respectively. We demonstrate controlled vertical positioning of an Al plate (25 μm thick, 3200 μm diameter) ranging up to 150 μm at an excitation signal with frequency f = 2 MHz and 105 mA effective current in the levitation microcoil. The positioning error is 2.6 μm.

Published in:

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

5-9 June 2011