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A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

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10 Author(s)
Min-Woo Jang ; Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA ; Chia-Ling Chen ; Partlo, W.E. ; Patil, S.R.
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An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011