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Using piezoresistive detection and piezoelectric actuation, the fabrication and testing of polycrystalline diamond based single-material MEMS (SMM) resonators, with a resonant frequency of 48.2 KHz and a quality factor of 160 in air, is reported for the first time. A 0.6-μm-thick boron-doped poly-C with a resistivity of 9 Ω·cm is used as a piezoresistor. A 50-nm-thick highly-doped poly-C inter-layer, with a resistivity of 5×10-3 Ω·cm, was used between the metal and the piezoresistor to reduce the contact resistance. A 3-μm-thick undoped poly-C film, with a resistivity >; 109 Ω·cm, was used as an insulating as well as a structural material.