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Fabrication and testing of CVD diamond single-material MEMS resonators with piezoresistive detection

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2 Author(s)
Zongliang Cao ; Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA ; Aslam, D.M.

Using piezoresistive detection and piezoelectric actuation, the fabrication and testing of polycrystalline diamond based single-material MEMS (SMM) resonators, with a resonant frequency of 48.2 KHz and a quality factor of 160 in air, is reported for the first time. A 0.6-μm-thick boron-doped poly-C with a resistivity of 9 Ω·cm is used as a piezoresistor. A 50-nm-thick highly-doped poly-C inter-layer, with a resistivity of 5×10-3 Ω·cm, was used between the metal and the piezoresistor to reduce the contact resistance. A 3-μm-thick undoped poly-C film, with a resistivity >; 109 Ω·cm, was used as an insulating as well as a structural material.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011