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Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique

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8 Author(s)
Liang He ; Dept. of Mech. Syst. & Design, Tohoku Univ., Sendai, Japan ; Toda, M. ; Kawai, Y. ; Miyashita, H.
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This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young's modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by deep reactive ion etching (deep RIE), then the CNT/resist is converted to CNT/carbon microstructures using two-step high temperature pyrolysis process in an inert gas. Then, the Si substrate is patterned by deep RIE. The maximum aspect ratio of the composite structures is approximately 40.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011