Referenced Items are not available for this document.
This paper reports experimental results of a novel room temperature vacuum sealing process based on compressing wire bonded gold “bumps”, causing a material flow into the access ports of vacuum-cavities. The leak rate out of manufactured cavities was measured over 5 days and evaluated to less than the detection limit, 6×10-12 mbarL/s, per sealed port. The cavities have been sealed at a vacuum level below 10 mbar. The method enables sealing of vacuum cavities at room temperature using standard commercial tools and processes.
Published in:
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Date of Conference: 5-9 June 2011
- Page(s):
- 1360 - 1363
- ISSN :
- Pending
- Print ISBN:
- 978-1-4577-0157-3
- INSPEC Accession Number:
- 12169628
- Conference Location :
- Beijing
- Digital Object Identifier :
- 10.1109/TRANSDUCERS.2011.5969522
- Product Type:
- Conference Publications
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