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CO2 measurement using an AlN/SI SAW sensor

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12 Author(s)

Carbon dioxide at concentrations close to 390ppm in atmosphere has to be measured for greenhouse effect and the indoor air quality monitoring. This paper reports for the first time CO2 measurement ranging from 0 to 3000ppm using a Surface Acoustic Wave sensor (SAW) based on Aluminum Nitride (AlN) technology. The detection is based on gravimetric approach using a 100 nm thick sensitive polymer bearing amino groups: poly(Allylamine) deposited over the SAW. A calculated CO2 sensitivity of about 15.3 Hz/ppm performed using Finite Element Method is in good agreement with experiment.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011