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High temperature compatible aluminum nitride resonating strain sensor

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6 Author(s)
F. T. Goericke ; Department of Mechanical Engineering, University of California, Berkeley, USA ; M. W. Chan ; G. Vigevani ; I. Izyumin
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Aluminum nitride (AlN) is a promising material for harsh environment sensing applications due to its piezoelectric effect and mechanical stability at high temperatures. In this work, AlN double-ended tuning forks (DETF) are presented as a transduction element to measure mechanical loads by observing the resonance frequency shift. The fabrication process of the MEMS devices including the bonding step to a steel parallel is described. Device operation is demonstrated for strain sensing up to 91 °C and operation of the transducer without applied strain is demonstrated up to 570 °C.

Published in:

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

5-9 June 2011