Referenced Items are not available for this document.
Miniature ultrasound acoustic imaging devices using 2-D pMUTs array on epitaxial PZT/SrRuO
In this paper, we demonstrate ultrasound acoustic imaging using a miniature 2-D piezoelectric micromachined ultrasonic transducers (pMUTs) array on an epitaxial PZT/SrRuO3(SRO)/Pt/γ-Al2O3/Si structure for the first time. 2-D pMUTs arrays containing 64 ch (8 × 8 arrays) with 100 μm-diameter circle shape element were fabricated. Detection properties of ultrasonic were measured in water with a ceramics PZT transducer as a point ultrasonic source. The epitaxial structure indicates higher sensitivity than the conventional SiO2/Si structure. 2-D acoustic images for acrylic targets were successfully observed using pMUTs array, which shows potentials for high resolution 3-D acoustic imaging.
Published in:
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Date of Conference: 5-9 June 2011
- Page(s):
- 910 - 913
- ISSN :
- Pending
- Print ISBN:
- 978-1-4577-0157-3
- INSPEC Accession Number:
- 12169283
- Conference Location :
- Beijing
- Digital Object Identifier :
- 10.1109/TRANSDUCERS.2011.5969159
- Product Type:
- Conference Publications
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