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Miniature ultrasound acoustic imaging devices using 2-D pMUTs array on epitaxial PZT/SrRuO3/Pt/³-Al2O3/Si structure

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9 Author(s)
Daisuke Akai ; Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology, JAPAN ; Takahiro Yogi ; Ikuo Kamja ; Yasuyuki Numata
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In this paper, we demonstrate ultrasound acoustic imaging using a miniature 2-D piezoelectric micromachined ultrasonic transducers (pMUTs) array on an epitaxial PZT/SrRuO3(SRO)/Pt/γ-Al2O3/Si structure for the first time. 2-D pMUTs arrays containing 64 ch (8 × 8 arrays) with 100 μm-diameter circle shape element were fabricated. Detection properties of ultrasonic were measured in water with a ceramics PZT transducer as a point ultrasonic source. The epitaxial structure indicates higher sensitivity than the conventional SiO2/Si structure. 2-D acoustic images for acrylic targets were successfully observed using pMUTs array, which shows potentials for high resolution 3-D acoustic imaging.

Published in:

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

5-9 June 2011