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A flexible integrated micromachined hot-film sensor array for measuring surface flow vector

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4 Author(s)
Que, R.Y. ; Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China ; Zhu, R. ; Wei, Q.Z. ; Cao, Z.

This paper reports a flexible micromachined integrated hot-film sensor array for measuring flow vector around object surfaces, such as on aircrafts and vessels. The flow sensing elements and electric wiring are fabricated directly on a flexible polyimide Printed Circuit Board (PCB) by incorporating standard printed circuit techniques with micromachining techniques. Three micro hot-film elements are integrated, and tailor-designed to implement the measurements for detecting local surface flow vector in a directional range of 180°. The theoretical and experimental verifications on the new method are presented.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011