Cart (Loading....) | Create Account
Close category search window
 

Compact electrode design for in-plane accelerometer on SOI with refilled isolation trench

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Xie, Jin ; Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore ; Agarwal, R. ; Youhe Liu ; Tsai, J.M.
more authors

A two-axis in-plane capacitive accelerometer fabricated on silicon-on-insulator (SOI) is developed. With each stationary electrode separated to two sub stationary electrodes by refilled isolation trench, the presented accelerometer has compact differential capacitance electrodes to improve capacitance sensitivity per sensing area. In addition, the overlap area-changed capacitor enables good linearity and low damping coefficient.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.