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Compact electrode design for in-plane accelerometer on SOI with refilled isolation trench

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5 Author(s)
Xie, Jin ; Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore ; Agarwal, R. ; Youhe Liu ; Tsai, J.M.
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A two-axis in-plane capacitive accelerometer fabricated on silicon-on-insulator (SOI) is developed. With each stationary electrode separated to two sub stationary electrodes by refilled isolation trench, the presented accelerometer has compact differential capacitance electrodes to improve capacitance sensitivity per sensing area. In addition, the overlap area-changed capacitor enables good linearity and low damping coefficient.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011