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A new low consumption 3D compass using integrated magnets and piezoresistive nano-gauges

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13 Author(s)
Ettelt, D. ; LETI, CEA, Grenoble, France ; Rey, P. ; Savoye, M. ; Coutier, C.
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We present for the first time a new concept for low-cost fabrication of a monolithic 3-axis MEMS compass using integrated permanent magnets and based on a technology compatible with inertial MEMS sensors. Piezoresistive gauges of nanometric scale enable to reduce the sensor size without sensitivity loss. Magnetometers were designed for sensitivities of 9V/T and resolutions less than 10nT/√Hz at a bridge current of 100μA and with an active surface of typically 200μm × 300μm. Ultra-low power consumption below 10μW can be achieved. First demonstrators have shown the good reliability of the concept and are in good agreement with design.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011