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A 3-axis accelerometer and strain sensor system for building integrity monitoring

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6 Author(s)
Santana, J. ; imec-Holst Centre, Eindhoven, Netherlands ; van den Hoven, R. ; van Liempd, C. ; Colin, M.
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An Ultra-Low-Power readout architecture for capacitive MEMS-based accelerometers and strain sensors is presented. The system can read both accelerometers and strain sensors in a half-bridge configuration. The gain is controlled by integrating pulses from the excitation voltage allowing accurate control of the Signal-to-Noise ratio. A Figure-of-Merit of 4.41×10-20 F√(W/Hz) was achieved for a sensor range of ±2.0g and ±20,000με over a 100Hz bandwidth. Residual motion artifacts are also cancelled by the system.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011

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