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A CMOS capacitive pressure sensor chip for fingerprint detection

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2 Author(s)
Yung-Shih Hsiung ; Dept. of Electr. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Lu, M.S.-C.

Biometric techniques, such as fingerprint detection, can be applied to identify a specific user for security and safety reasons. We present a capacitive fingerprint sensor that can detect the difference of pressures induced by the ridges and valleys of a finger tip. Post-CMOS fabrication of the 8×32 sensor array is conducted based on wet etch of CMOS metal layers without requiring additional thin-film deposition and patterning. The size of each sensing pixel is 65×65 μm2. The measured sensor sensitivity was 0.39 fF/MPa. Part of the fingerprint image was successfully produced by the CMOS sensor chip.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011