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Design of T-shape vector hydrophone based on MEMS

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6 Author(s)
Linggang Guan ; Sci. & Technol. on Electron. Test & Meas. Lab., Taiyuan, China ; Guojun Zhang ; Chenyang Xue ; Wendong Zhang
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This paper reports the design and fabrication of T-shape vector hydrophone based on MEMS inspired by fish lateral line. Based on the analysis of mechanical properties of T-beam, the design and fabrication process of microstructure are described in detail, and then the characteristics of the microstructure are analyzed by the ANSYS. The first-order resonance frequency is 1970Hz, and the position of the piezoresistor is away from edges about 120μm. The microstructure is manufactured by means of the silicon-on-insulator (SOI) craft. The test results show that hydrophone's receiving sensitivity is up to -180dB (0dB = 1V/μPa), displaying a clear directivity pattern in the form of “8” shape.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011