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Plasma Etching Process Induced Poly Film Damage

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4 Author(s)
Po-Tao Chu ; Taiwan Semiconductor Manufacturing Company ; Fang-Cheng Chen ; Chih-Chien Hung ; Ying-Chen Chao

First Page of the Article

Published in:

Plasma Process-Induced Damage, 1997., 2nd International Symposium on

Date of Conference:

13-14 May 1997