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Impedance-Based Force Transduction Within Fluid-Filled Parylene Microstructures

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2 Author(s)
Christian A. Gutierrez ; Univ. of Southern California, Los Angeles, CA, USA ; Ellis Meng

We report on the use of electrochemical impedance (EI) as the basis for force transduction in Parylene-based microdevices. Electrolyte-filled microstructures were realized for extremely sensitive contact-force detection (10 mN range, ±0.023 mN resolution) enabled by EI-based transduction and are a promising platform for next-generation biomedical sensing technology. The design, fabrication, and characterization of Parylene-based electrochemical-MEMS (EC-MEMS) devices capable of microNewton contact-mode force measurement are presented and discussed.

Published in:

Journal of Microelectromechanical Systems  (Volume:20 ,  Issue: 5 )