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Low-loss PECVD silica channel waveguides for optical communications

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6 Author(s)
G. Grand ; LETI, CEA-CENG, Grenoble, France ; J. P. Jadot ; H. Denis ; S. Valette
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The authors report reproducible measurements of propagation losses in channel waveguides fabricated on silicon substrate by PECVD. The average value obtained from more than 50 different channel guides is 0.1 dB/cm at 1.55 mu m. The behaviour with wavelength is also presented and discussed.

Published in:

Electronics Letters  (Volume:26 ,  Issue: 25 )