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The paper propose a novel design of multiple element proximity coupled antenna in the frequency band 5-6 GHz. At first, a linearly polarised rectangular patch antenna is discussed. The basic rectangular structure is modified using proximity coupled feed to enhance the impedance bandwidth. In order to introduce circular polarisation, the patch structure is further modified into Split Ring structure. An Array of such split Ring is then constructed to increase the directivity and to obtain significant beamforming characteristics. The performance of Split Ring (SR) Array Antenna is investigated in terms of relevant parameters viz. impedance bandwidth, gain, axial ratio and efficiency. The SR Array antenna exhibits qualitatively better performance and could be used for wireless MIMO beamforming applications. 70 nm and 45 nm. The comparison between three technologies interestingly shows that the effect of line resistive and capacitive parasitic variation on propagation delay has almost uniform trend as feature size shrinks. However, resistive parasitic variation in global interconnects has very nominal effect on the propagation delay as compared to capacitive parasitic. Propagation delay variation is from 0.01% to 0.04% and -4.32% to 18.1 % due to resistive and capacitive deviation of -6.1% to 25% respectively.