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Direct Metal Transfer Lithography for Fabricating Wire-Grid Polarizer on Flexible Plastic Substrate

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3 Author(s)
Chun-Hung Chen ; Department of Mechanical Engineering, National Cheng Kung University, Tainan , Taiwan ; Te-Hui Yu ; Yung-Chun Lee

This paper reports on the fabrication of polymer-based metallic wire-grid polarizers using a direct metal contact printing method. The proposed method can directly transfer a metal pattern from a silicon mold to a soft plastic substrate simply by roller pressing and infrared (IR) heating. With properly chosen loading contact pressure and heating temperature, metallic linear grating structures with a linewidth of 60 nm, a period of 170 nm, and an area size of 2.5 ×2.5 cm2 are successfully formed on the surface of a polyethylene terephtalate (PET) substrate. The optical performance of the fabricated flexible polarizers is experimentally measured and numerically analyzed in the near-IR spectrum with wavelength from 800 to 1500 nm. Inspired by the numerical simulation results, the optical characteristics of the flexibe polarizers are further enhanced by reactive ion etching on the PET substrate. Good agreements between experiments and theoretical simulation are obtained. Future developments and potential applications of this metal contact transfer lithography method will be addressed.

Published in:

Journal of Microelectromechanical Systems  (Volume:20 ,  Issue: 4 )