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One step non-contact fabrication of polymer microlens arrays by thermocapillary lithography

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2 Author(s)
McLeod, E. ; Lab. of Interfacial & Small Scale Transp., California Inst. of Technol., Pasadena, CA, USA ; Troian, Sandra M.

Thermocapillary lithography, a continuous-relief patterning technique, is used to fabricate polymer microlens arrays with variable pitch and focal length. Pattern definition results from sculpting by thermocapillary forces imposed by a cooled mask.

Published in:

Lasers and Electro-Optics (CLEO), 2011 Conference on

Date of Conference:

1-6 May 2011