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Fabrication of stepped and reflowed 3-D profiles for optical applications by dose-modulated electron beam lithography and selective thermal reflow

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2 Author(s)
Schift, Helmut ; Lab. for Micro- & Nanotechnol., Paul Scherrer Inst., Villigen, Switzerland ; Schleunitz, A.

Microlens and prism arrays were fabricated using multi-level electron beam patterning combined with thermal reflow. The molecular weight dependent processing allows selective transfer of stepped into sloped resist structures with smooth surfaces.

Published in:

Lasers and Electro-Optics (CLEO), 2011 Conference on

Date of Conference:

1-6 May 2011

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