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Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation

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5 Author(s)
James D. Claverley ; Engineering Measurement Division National Physical Laboratory Teddington, United Kingdom ; Dong-Yea Sheu ; Arne Burisch ; Richard K. Leach
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In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

Published in:

Assembly and Manufacturing (ISAM), 2011 IEEE International Symposium on

Date of Conference:

25-27 May 2011