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Diamond-on-Polymer Microelectrode Arrays Fabricated Using a Chemical Release Transfer Process

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4 Author(s)
Hess, A.E. ; Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA ; Sabens, D.M. ; Martin, H.B. ; Zorman, C.A.

This paper reports the design, fabrication, and characterization of diamond-on-polymer microelectrode arrays. A “diamond-first” chemical release transfer process was implemented to integrate diamond electrodes, grown at temperatures >; 700 °C, on a temperature-sensitive polynorbornene-based (PNB) substrate, allowing for the advantageous neural interfacing properties of diamond to be utilized in a flexible device. Intracortical probes with two electrodes and peripheral nerve electrode arrays with ten electrodes ranging in area from 800 to 41 000 μm2 were fabricated. Mechanical testing showed that the structures were flexible, with the composite structure having mechanical characteristics similar to bare PNB. Electrical testing confirmed that ohmic contacts were formed without a postanneal step and determined a diamond-on-polymer electrode impedance of ~ 1.5 MΩ at 1 kHz.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 4 )

Date of Publication:

Aug. 2011

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