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3.4 GHz composite thin film bulk acoustic wave resonator for miniaturized atomic clocks

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2 Author(s)
Artieda, Alvaro ; Laboratoire de Céramique, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland ; Muralt, P.

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Triple layer SiO2/AlN/SiO2 composite thin film bulk acoustic wave resonators (TFBARs) were studied for applications in atomic clocks. The TFBAR’s were tuned to 3.4 GHz, corresponding to half the hyperfine splitting of the ground state of rubidium 87Rb atoms. The quality factor (Q) was equal to 2300 and the temperature coefficient of the resonance frequency fr amounted to 1.5 ppm/K. A figure of merit Qfr of ∼ 0.8 × 1013 Hz and a thickness mode coupling factor of 1% were reached. Such figures are ideal for frequency sources in an oscillator circuit that tracks the optical signal in atomic clocks.

Published in:

Applied Physics Letters  (Volume:98 ,  Issue: 26 )

Date of Publication:

Jun 2011

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