Scheduled System Maintenance:
On Monday, April 27th, IEEE Xplore will undergo scheduled maintenance from 1:00 PM - 3:00 PM ET (17:00 - 19:00 UTC). No interruption in service is anticipated.
By Topic

Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Garcia-Gancedo, L. ; Dept. of Eng., Univ. of Cambridge, Cambridge, UK ; Al-Naimi, F. ; Flewitt, A.J. ; Milne, W.I.
more authors

FBAR devices with carbon nanotube (CNT) electrodes have been developed with the aim of taking advantage of the low density and high acoustic impedance of the CNTs compared to other known materials. The influence of the CNTs on the frequency response of the FBAR devices was studied by comparing two identical sets of devices, one set comprised FBARs fabricated with chromium/gold bilayer electrodes, and the second set comprised FBARs fabricated with CNT electrodes. It was found that the CNTs had a significant effect on attenuating travelling waves at the surface of the FBARs membranes due to their high elastic stiffness. Finite element analysis of the devices fabricated was carried out using COMSOL Multiphysics, and the numerical results confirmed the experimental results obtained.

Published in:

Ultrasonics Symposium (IUS), 2010 IEEE

Date of Conference:

11-14 Oct. 2010