Scheduled System Maintenance on May 29th, 2015:
IEEE Xplore will be upgraded between 11:00 AM and 10:00 PM EDT. During this time there may be intermittent impact on performance. For technical support, please contact us at We apologize for any inconvenience.
By Topic

High frequency lamb wave resonator using LiNbO3 crystal thin plate and application to tunable filter

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Kadota, M. ; Murata Manuf. Co., Ltd., Nagaokakyo, Japan ; Ogami, T.

A cognitive radio system using a frequency from 400 MHz to 6 GHz requires tunable filters with a wide variable frequency range. The cognitive radio also requires a tunable filter in high frequency such as 5 to 6 GHz among them. Ultra wide band resonators are effective to realize their tunable filters. A Lamb wave on a LiNbO3 this plate having a high velocity and a large electro-mechanical coupling factor is suitable for their resonators. Ultra wide band resonator in high frequency requires an optimum large reflection coefficient and a substrate with a large electro-mechanical coupling factor and a high velocity. This time, authors attempt to fabricate a higher frequency Lamb wave resonator on a LiNbO3 single crystal thin plate instead of the LiNbO3 thin film, though it has been considered that it is difficult to make a very thin LiNbO3 plate such as thinner than 1 μm. A new one-port Lamb wave resonator was fabricated on an Al electrode/LiNbO3 crystal thin plate/air gap/Si substrate with the plate thickness of 0.15A (actual thickness = 395 nm). It showed a high resonant frequency (fr) of 5.44 GHz, a high anti-resonant one (fa) of 6.09 GHz, a wide band-width of 12%, and a large impedance ratio of 62 dB at the fr and the fa. Moreover, the authors attempted to construct theoretically the ladder type of tunable filter using this Lamb wave resonators. The filter with the tunable range of 9% from 5.58 to 6.06 GHz have been obtained.

Published in:

Ultrasonics Symposium (IUS), 2010 IEEE

Date of Conference:

11-14 Oct. 2010