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A vertical-cavity surface-emitting laser appliqued to a 0.8-μm NMOS driver

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3 Author(s)
Mathine, D.L. ; Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA ; Droopad, R. ; Maracas, G.N.

An optoelectronic integrated circuit (OEIC) composed of a vertical-cavity surface-emitting laser (VCSEL) appliqued to an NMOS drive circuit was fabricated to form an optical link from the CMOS chip. A custom NMOS circuit was designed and fabricated through the MOSIS foundry service in a standard 0.8-μm CMOS process. InGaAs quantum-well VCSELs were grown, fabricated and tested on an n-type GaAs substrate. Next, the VCSELs underwent a substrate removal technique and were appliqued to the NMOS circuitry. The OEIC was tested at the chip level and showed an electrical to optical conversion efficiency of 1.09 mW/V. Modulation results are also discussed.

Published in:

Photonics Technology Letters, IEEE  (Volume:9 ,  Issue: 7 )