Referenced Items are not available for this document.
An optoelectronic integrated circuit (OEIC) composed of a vertical-cavity surface-emitting laser (VCSEL) appliqued to an NMOS drive circuit was fabricated to form an optical link from the CMOS chip. A custom NMOS circuit was designed and fabricated through the MOSIS foundry service in a standard 0.8-/spl mu/m CMOS process. InGaAs quantum-well VCSELs were grown, fabricated and tested on an n-type GaAs substrate. Next, the VCSELs underwent a substrate removal technique and were appliqued to the NMOS circuitry. The OEIC was tested at the chip level and showed an electrical to optical conversion efficiency of 1.09 mW/V. Modulation results are also discussed.
Published in:
Photonics Technology Letters, IEEE
(Volume:9
,
Issue:
7
)
Date of Publication: July 1997
- Page(s):
- 869 - 871
- ISSN :
- 1041-1135
- INSPEC Accession Number:
- 5619651
- Digital Object Identifier :
- 10.1109/68.593327
- Date of Current Version :
- 06 August 2002
- Issue Date :
- July 1997
- Sponsored by :
- IEEE Photonics Society
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