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Fabrication of a Miniaturized Thin-Film Temperature Sensor on a Sapphire Fiber Tip

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5 Author(s)
Jiajun Wang ; Bradley Dept. of Electr. & Comput. Eng., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA ; Lally, E.M. ; Bo Dong ; Jianmin Gong
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We report a miniature thin-film-based high-temperature sensor prototype with potential for batch fabrication. A thin Tantalum Pentoxide film was deposited on the tip of a polished sapphire fiber using electron-beam evaporation. Using low-coherence optical interferometry, the film was tested as a temperature sensor from 200°C to 1000°C, and its resolution was measured to be 1.4°C. In addition to its potential for low-cost batch production, the sensor's ultra-miniature size of only 75 μm makes it ideal for embedded sensing applications in harsh environments.

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 12 )

Date of Publication:

Dec. 2011

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