Cart (Loading....) | Create Account
Close category search window
 

Fabrication of a Miniaturized Thin-Film Temperature Sensor on a Sapphire Fiber Tip

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Jiajun Wang ; Bradley Dept. of Electr. & Comput. Eng., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA ; Lally, E.M. ; Bo Dong ; Jianmin Gong
more authors

We report a miniature thin-film-based high-temperature sensor prototype with potential for batch fabrication. A thin Tantalum Pentoxide film was deposited on the tip of a polished sapphire fiber using electron-beam evaporation. Using low-coherence optical interferometry, the film was tested as a temperature sensor from 200°C to 1000°C, and its resolution was measured to be 1.4°C. In addition to its potential for low-cost batch production, the sensor's ultra-miniature size of only 75 μm makes it ideal for embedded sensing applications in harsh environments.

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 12 )

Date of Publication:

Dec. 2011

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.