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An 18-ns 1-Mbit CMOS SRAM

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6 Author(s)
Shimada, H. ; Fujitsu Ltd., Kawasaki, Japan ; Tange, Y. ; Tanimoto, K. ; Shiraishi, M.
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A 1-Mb (256 K×4 b) CMOS static random-access memory with a high-resistivity load cell was developed with 0.7-μm CMOS process technology. This SRAM achieved a high-speed access of 18 ns. The SRAM uses a three-phase back-bias generator, a bus level-equalizing circuit and a four-stage sense amplifier. A small 4.8×8.5-μm2 cell was realized by the use of a triple-polysilicon structure. The grounded second-polysilicon layer increases cell capacitance and suppresses α-particle-induced soft errors. The chip size measures 7.5×12 mm2

Published in:
Solid-State Circuits, IEEE Journal of  (Volume:23 ,  Issue: 5 )

Date of Publication: Oct 1988

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