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Directly UV written silica-on-silicon planar waveguides with low loss

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2 Author(s)
Svalgaard, M. ; Microelectron. Center, Tech. Univ. Denmark, Lyngby ; Kristensen, M.

Planar waveguides have been fabricated in silica-on-silicon using a continuous wave UV laser beam. A propagation loss of <0.2 dB/cm and low bending loss are demonstrated. The authors' results show that the UV writing method permits high volume production of low loss waveguide components

Published in:

Electronics Letters  (Volume:33 ,  Issue: 10 )