Referenced Items are not available for this document.
A micromachined variable capacitor that achieves a wide tuning range is proposed. The device, which was fabricated in a polysilicon surface micromachining process, has a tuning range of 25% and a quality factor of 9.6 at 1 GHz when the capacitance is tuned to 4pF
Published in:
Electronics Letters
(Volume:33
,
Issue:
11
)
Date of Publication: 22 May 1997
- Page(s):
- 922 - 924
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 5597764
- Digital Object Identifier :
- 10.1049/el:19970628
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- 22 May 1997
- Sponsored by :
- Institution of Engineering and Technology
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