A method using the base plate jerk feedback to control the positioning of a pneumatic stage — Control of the stage vibration caused by the reaction force

In this paper, a pneumatic positioning stage is considered. The stage is moved by the driving force and the reaction force leads the base plate to vibrate, resulting in the fluctuation of the stage in the opposite direction. In order to reduce the effect of the reaction force and improve the positioning time, the base plate jerk feedback is proposed. This feedback is firstly realized using an external force exerted to the base plate and then applied for the real condition of positioning. The experimental results show the effectiveness of the proposed method.