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Carbon metal composite film deposited using novel Filtered Cathodic Vacuum Arc technique

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6 Author(s)
Nai Yun Xu ; School of Eectrical and Electronic Engineering, Nanyang Technology University, 50 Nanyang Avenue, Singapore 639798 ; Hang Tong Teo ; Xin Cai Wang ; An Yan Du
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Carbon Nickel composite (C/Ni) film was prepared using a novel Filtered Cathodic Vacuum Arc (FCVA) technique. And reference pure carbon (C) film was also prepared for comparison purpose. The atomic fraction of Ni was estimated using Energy Dispersive X-Ray (EDX) spectroscopy. Atomic Force Microscopy was used to study the surface condition of the as-deposited pure C and C/Ni film, and the detailed crystal structure observed using high resolution transmission microscopy (HRTEM). Excimer laser annealing was performed to pure DLC films and C/Ni films, the structure evolution upon annealing and the effect of present of Ni in C/Ni film during laser annealing was studied using visible Raman spectroscopy.

Published in:

2011 IEEE 61st Electronic Components and Technology Conference (ECTC)

Date of Conference:

May 31 2011-June 3 2011