Development of wafer level underfill materials and assembly processes for fine pitch Pb-free solder flip chip packaging

We developed a latent curing, low outgassing wafer level underfill (WLUF) material and applied fast temperature ramping to achieve 100% electrically and metallurgically good flip chip solder joints. Also, void formation within the underfill material during the bonding process was minimized. Subsequently, these voids were virtually eliminated during a post cure process of the WLUF material which uses pulsed amplitude pressure. A WLUF with 60% (weight) filler was applied by spin coating onto a wafer with Pb-free solder bumps. Following B-stage curing at 90°C, the thickness was measured to be 20 microns over the solder bump height. In the B-staged state, this WLUF is stable at room temperature for several weeks. After the wafer was diced into chips, a chip was aligned and joined to a substrate with an optimized heating and cooling cycle. This WLUF assembly process has been evaluated using a flip chip test vehicle with 150 micron pitch and 3,300 area array solder bumps. The chip bumps were SnAg solder and the pre-solder on the substrate was SnAgCu. The size of the test chip was 9 × 13 mm and the test substrate was 42.5 × 42.5 mm. The test chip and substrate were designed to allow both two and four wire contact resistance measurements of the electrical interconnect structures. We successfully demonstrated 100% electrically and metallurgically good Pb-free joints. Voids inside the WLUF after flip chip bonding were decreased significantly using the pulsed amplitude pressure, post cure process. Scanning acoustic microscopy (SAM) analysis showed nearly void-free underfill bonding. After JEDEC level three preconditioning, environmental stress testing was completed and included 1000 deep thermal cycles of -55 to 125°C; 1000 hrs at 85C/85% temperature and humidity; and 1000 hrs of 150°C high temperature storage. Contact resistance measurements were made at time zero, after preconditioning and every 250 cycles or hours of environmental stress. The contact resistance measurements were stable on all parts. Detailed material and process development, and reliability test results are described in this paper.