Cart (Loading....) | Create Account
Close category search window

Full automatic on the fly optical macro wafer edge inspection system

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Kirmizigul, D. ; Inst. of Artificial Intell., Dresden Univ. of Technol., Dresden, Germany ; Frohlich, H.

We present a low cost optical macro inspection system for the wafer edge. The system is able to inspect the full wafer edge (front-, backside and apex) and provides a short feedback loop to the unit processes. Furthermore the use of image processing methods enables inspection without additional time loss. This inspection system can be installed on all wafer rotating tools with free space for hardware installation.

Published in:

Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI

Date of Conference:

16-18 May 2011

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.