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Test structures applied to the rapid prototyping of sensors

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3 Author(s)
Buehler, M.G. ; Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA ; Cheng, L.-J. ; Martin, D.P.

A multi-project ceramic substrate was used in developing a gas sensor and pressure sensor. The co-fired ceramic substrate contained 36 chips with six variants including sensors, process control monitors, and an interconnect chip. The gas sensor is being developed as an air quality monitor for the Space Shuttle and the pressure gauge as a Martian barometer. This effort is in its initial phase. The test structures were used to identify problems and to point to solutions

Published in:

Microelectronic Test Structures, 1997. ICMTS 1997. Proceedings. IEEE International Conference on

Date of Conference:

17-20 Mar 1997