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A DC voltage capacitance matching tester

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2 Author(s)
McNeill, B.W. ; AT&T Bell Labs., Allentown, PA, USA ; Hanle, C.

We developed a self-contained capacitor matching tester that requires only the application and measurement of DC voltages. The test circuit includes its own oscillator, a nonoverlapping clock generator, and a second-order active lowpass filter. Our measurement accuracy is about 0.005% 3-sigma, and the tester is 1000 microns high by 300 microns wide

Published in:

Microelectronic Test Structures, 1997. ICMTS 1997. Proceedings. IEEE International Conference on

Date of Conference:

17-20 Mar 1997

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