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Microring Resonator Wavelength Tunable Filter Using Five-Layer Asymmetric Coupled Quantum Well

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5 Author(s)
Makino, T. ; Nippon Ericsson K.K., Tokyo, Japan ; Gotoh, T. ; Hasegawa, R. ; Arakawa, T.
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We propose and demonstrate a semiconductor single microring resonator wavelength tunable filter utilizing InGaAs/InAlAs five-layer asymmetric coupled quantum wells for a fast low-power operation. A directional coupler with a shallow gap is used for coupling between busline and microring waveguides to control precisely the coupling efficiency. A wafer is grown by molecular beam epitaxy, and the waveguides are fabricated by two-step inductively coupled plasma reactive ion etching. The resonant wavelength shift of 0.9 nm is obtained under the reverse bias of 13 V.

Published in:

Lightwave Technology, Journal of  (Volume:29 ,  Issue: 16 )

Date of Publication:

Aug.15, 2011

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