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This paper presents the research on tactile sensing system on chip. The tactile sensing chips comprise of 5 × 5 array of Piezoelectric Oxide Semiconductor Field Effect Transistor (POSFET) devices and temperature sensors. The POSFET devices are obtained by spin coating piezoelectric polymer, poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)), films directly on to the gate area of Metal Oxide Semiconductor (MOS) transistors. The tactile sensing chips are able to measure dynamic contact forces and temperatures. The readout and the data acquisition system to acquire the tactile signals are also presented. The chips have been extensively tested over wide range of dynamic contact forces and temperatures and the experimental results are presented. The paper also reports the research on tactile sensing chips with POSFET array and the integrated electronics.
Date of Publication: Dec. 2011