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Fabrication of low loss, waveguide grating filters using electron beam lithography

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3 Author(s)
Millar, P. ; Dept. of Electron. & Electr. Eng., Glasgow Univ. ; Harkins, R. ; Aitchison, J.S.

A single step, electron beam writing process for the fabrication of low loss grating filters on AlGaAs rib waveguides is described. The technique allows both waveguide and grating to be defined in a single processing step. Linear loss measurements are presented which show that the presence of the grating has no significant effect on the throughput of the waveguides

Published in:

Electronics Letters  (Volume:33 ,  Issue: 12 )

Date of Publication:

5 Jun 1997

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