Referenced Items are not available for this document.
A single step, electron beam writing process for the fabrication of low loss grating filters on AlGaAs rib waveguides is described. The technique allows both waveguide and grating to be defined in a single processing step. Linear loss measurements are presented which show that the presence of the grating has no significant effect on the throughput of the waveguides
Published in:
Electronics Letters
(Volume:33
,
Issue:
12
)
Date of Publication: 5 Jun 1997
- Page(s):
- 1031 - 1032
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 5611087
- Digital Object Identifier :
- 10.1049/el:19970712
- Date of Current Version :
- 06 August 2002
- Issue Date :
- 5 Jun 1997
- Sponsored by :
- Institution of Engineering and Technology
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