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High-resolution displacement measurement using mode interference in the optical waveguide

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4 Author(s)
M. Doi ; Optomech. R&D Dept., Nikon Corp., Tokyo, Japan ; Y. Iwasaki ; T. Shionoya ; K. Okamoto

Using an optical waveguide, high-resolution displacement measurement is achieved for the first time. The measurement principle is based on the interference between the two (even and odd) modes in the double-mode waveguide. After the light from a laser diode is focused onto the object to be measured, the wavefront gradient of the reflected light is detected using a Ti-indiffused LiNbO/sub 3/ channel waveguide. Although this optical measurement system is very simple, very high resolution (of less than 1 mn) is obtained. Besides, the characteristics of the measurement system do not depend on the surface condition of the object.

Published in:

IEEE Photonics Technology Letters  (Volume:9 ,  Issue: 5 )