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Browse Journals & Magazines > Photonics Technology Letters, ...> Volume:9 Issue:5 Help

High-resolution displacement measurement using mode interference in the optical waveguide

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4 Author(s)
Doi, M. ; Optomech. R&D Dept., Nikon Corp., Tokyo, Japan ; Iwasaki, Y. ; Shionoya, T. ; Okamoto, Kazuya

Using an optical waveguide, high-resolution displacement measurement is achieved for the first time. The measurement principle is based on the interference between the two (even and odd) modes in the double-mode waveguide. After the light from a laser diode is focused onto the object to be measured, the wavefront gradient of the reflected light is detected using a Ti-indiffused LiNbO/sub 3/ channel waveguide. Although this optical measurement system is very simple, very high resolution (of less than 1 mn) is obtained. Besides, the characteristics of the measurement system do not depend on the surface condition of the object.

Published in:
Photonics Technology Letters, IEEE  (Volume:9 ,  Issue: 5 )

Date of Publication: May 1997

Page(s):
651 - 653
ISSN :
1041-1135
INSPEC Accession Number:
5575684
Digital Object Identifier :
10.1109/68.588181
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
May 1997
Sponsored by :
IEEE Photonics Society

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