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Comparing various types of minienvironments

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1 Author(s)
Abuzeid, S. ; Minienviron. & Autom. Res. Center, Asyst Technol. Inc., Milpitas, CA, USA

The application of minienvironment-based isolation technology for the reduction and control of particulate contamination levels has progressed from the development and evaluation stages to its current status as a preferred alternative for new semiconductor manufacturing facilities. This paper examines various types of minienvironments currently used in existing and new semiconductor manufacturing facilities including, ceiling-hung or ceiling-suspended, self-powered, floor-supported with a fan-filter module, and tool-integrated minienvironments. This paper also examines and compares various parameters affecting the semiconductor manufacturing operations such as ergonomics, flexibility, performance and cost and discusses the integration of minienvironments into the facility

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI

Date of Conference:

14-16 Nov 1994