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CAD tools for bridging microsystems and foundries

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3 Author(s)
J. M. Karam ; TIMA Lab., SGS-Thomson Microelectron., Grenoble, France ; B. Courtois ; H. Boutamine

To move microsystems from research prototypes to an industrial market, CMP, the French multiproject wafer service, has adapted an existing commercial tool to the automated design of micromachined devices

Published in:

IEEE Design & Test of Computers  (Volume:14 ,  Issue: 2 )