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CAD tools for bridging microsystems and foundries

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3 Author(s)
Karam, J.M. ; TIMA Lab., SGS-Thomson Microelectron., Grenoble, France ; Courtois, B. ; Boutamine, H.

To move microsystems from research prototypes to an industrial market, CMP, the French multiproject wafer service, has adapted an existing commercial tool to the automated design of micromachined devices

Published in:

Design & Test of Computers, IEEE  (Volume:14 ,  Issue: 2 )